Access Floors   Access Floors
Access Floors
Access Floors

Application .:. Cleanrooms / Semiconductor Fab's


As the world leader in access floor technology, we understand the important issues involved with cleanroom floor design issues facing the industry. These include: footfall and traffic vibration as well as potential seismic events, heavy rolling loads in the form of 300mm wafer processing tools, electrical static build-up that can short out sensitive circuits, airflow distribution and volume vs. energy considerations, and dealing with ever smaller particulate and gaseous airborne contamination challenges. Our engineering, technical support, and experienced manufacturing expertise provide worldwide solutions to these ever changing problems within microelectronics industry, from Class 1 through Class 100 to meet Federal STD. 209E/ISO14644-1.

Airborne Contamination

As the line widths of semiconductor circuits have continued to decrease, how to deal with airborne particulates that can short out these delicate communication pathways has become an increasingly greater challenge. Environments that once were acceptable with the presence of 1 micron or even .05 micron particles, can no longer tolerate even sub-micron contamination in gaseous form. Specialized enhancement in access floor product design, as well as various high-tech coatings and surface finishes, help to minimize the release of small airborne particulates and out-gassing, which can damage expensive semiconductor products.

Build Clean Requirements

Tate has the unique capability to package your flooring components within a clean environment using non-out-gassing packaging material. In addition, Pugliese's installation crews wear industry approved clean garments, and are trained to install flooring within an ultra-clean protocol environment using specially encased tools.

Airflow Options

Airflow patterns and velocity still remain a critical element in the efficient design of effective sub-micron semiconductor cleanrooms. Tate airflow panels are available using either a traditional 25% open perforated hole design or 60% open grates, with optional dampers to balance air distribution within a room as necessary. Extensive real world research and testing has resulted in a broad range of airflow panel design options, such as chamfered holes that eliminate air turbulence and reduce "whistling" sounds.

Rolling Load Issues

With some semiconductor processing tools approaching 30,000 lbs. or more, it is essential that the access floor be able to handle the massive rolling loads they are exposed to when these machines are moved in and out of the fabs. The Tate Floating's Floor FF3000 die caste aluminum flooring system, with ultimate loads up to 4,500/sq. in., has been uniquely designed to meet these excessively heavy pieces of equipment.

Conductivity Concerns

The potential static build-up of electricity on fab workers is the mortal enemy of the semiconductor, allowing electrical surges to short out the delicate multi-layered circuitry within the transistors. The remedy is the various conductive surface finishes available on both solid and perforated access floor panels, as well as specialty coatings and platings for the grates...not to mention the first line of defense of the naturally conductive aluminum floor and understructure itself!

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